Overview of KRC-MLF
The Multiple Layer Film (MLF) for depth profiling analysis is a CRM for depth distribution analysis through various surface analysis methods, such as XPS, AES, and SIMS. It is used to measure sputtering rates or to evaluate depth resolution.
The KRC-MLF has five Si and five Ge layers alternately deposited with a thickness of 10, 20, 50 nm and can be used for the evaluation of depth resolution during depth profiling analysis by AES, XPS, and SIMS.
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(10 x 10 x 0.65 mm)Specifications of KRC-MLF
| Item | Detailed Specifications |
| Nominal thickness | 10, 20, 50 nm |
| Material | Si/Ge multiple layers |
| Substrate | Si(100) |
| Specimen size | 10 mm x 10 mm x 0.65 mm |
| Traceability | STEM/EDS line profile, HR-TEM image |
TEM Image
