Overview of KRC-TSC-200
The tip shape checker is a nanostructure with a single isolated line width and is used to check the overall shape of the AFM probe. If the certified line width is eliminated from the AFM line profile of an isolated line between the two 400 nm wide trenches, the shape of the probe can be obtained.
Specifications of KRC-TSC-200
| Item | Detailed Specifications |
| Pattern width | 180 nm |
| Trench width | 400 nm |
| Pattern height | 1,000 nm (not certified) |
| Pattern length | 4.0 mm (certified area: 3.0 mm from center) |
| Roughness (Rq) | max 1.0 nm |
| Defectivity | max 1% (max 60 um within 3,000 μm certified area) |
| Traceability | Si lattice constant measured by TEM: ILAC-MRA, KOLAS |
SEM Image and AFM line profile
